Semiconductor device and fabrication method thereof

ABSTRACT

A method of fabricating a semiconductor device is provided. The method includes forming a substrate structure, wherein the substrate structure includes a substrate and a fin-shaped barrier layer formed on a surface of the substrate; forming a quantum well (QW) material layer on a surface of the fin-shaped barrier layer; and forming a barrier material layer on the QW material layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims priority to Chinese Patent Application No.201310327029.6 filed on Jul. 31, 2013 entitled “SEMICONDUCTOR DEVICE ANDFABRICATION METHOD THEREOF”, which is incorporated herein by referencein its entirety.

TECHNICAL FIELD

The present disclosure relates to the field of semiconductors, and moreparticularly, to a semiconductor device and method of fabricating thesemiconductor device.

DESCRIPTION OF THE RELATED ART

A High Electron Mobility Transistor (HEMT) typically includes amodulation-doped heterojunction and a corresponding source-drainstructure. The modulation-doped heterojunction forms a quantum well inwhich electrons can move quickly without colliding with impurities(unlike conventionally-doped MOSFETs). Effectively, a layer (called aTwo-Dimensional Electron Gas (2-DEG)) is created in the heterojunctionof the HEMT. The 2-DEG has high electron mobility and is notsubstantially affected by the scattering of ionized impurity ions. As aresult, HEMT devices have attracted much attention in recent years.

Due to reductions in device size, HEMT devices incorporating Ultra-ThinBody (UTB) structures (such as Quantum Wells (QW)) have been proposed.In particular, short-channel effects resulting from the continuousdown-scaling of Metal Oxide Semiconductor (MOS) transistors can bemitigated using planar QW transistors.

To further mitigate the short-channel effects, non-planar QW transistorsmay be used instead of planar QW transistors. However, existingnon-planar QW transistors are prone to electron overflow, which couldimpact device performance.

SUMMARY

The present disclosure is directed to address at least the aboveproblems relating to existing QW transistors in HEMT devices.

According to some embodiments of the inventive concept, a method offabricating a semiconductor device is provided. The method includesforming a substrate structure, wherein the substrate structure includesa substrate and a fin-shaped barrier layer formed on a surface of thesubstrate; forming a quantum well (QW) material layer on a surface ofthe fin-shaped barrier layer; and forming a barrier material layer onthe QW material layer.

In some embodiments, an insulating part may be formed adjacent to thefin-shaped barrier layer on the surface of the substrate, and formingthe QW material layer on the surface of the fin-shaped barrier layer mayfurther include forming the QW material layer on a portion of thesurface of the fin-shaped barrier layer that is not covered by theinsulating part.

In some embodiments, the method may further include forming a gatestructure, wherein the gate structure may include a gate insulatinglayer formed on a portion of the barrier material layer and a portion ofthe insulating part, a gate formed on the gate insulating layer, and aspacer formed on opposite sides of the gate.

In some embodiments, the method may further include etching, using thegate structure as a mask, until a portion of the fin-shaped barrierlayer is exposed; forming an undercut in the QW material layer and thebarrier material layer under the gate structure, so as to increase anarea of the exposed portion of the fin-shaped barrier layer; anddepositing a semiconductor material on the exposed portion of thefin-shaped barrier layer to form a source region and a drain region.

In some embodiments, the method may further include forming a gatestructure, wherein the gate structure may include a gate insulatinglayer formed on at least a portion of the barrier material layer, a gateformed on the gate insulating layer, and a spacer formed on oppositesides of the gate.

In some embodiments, the method may further include etching, using thegate structure as a mask, until a portion of the fin-shaped barrierlayer is exposed; forming an undercut in the QW material layer and thebarrier material layer under the gate structure, so as to increase anarea of the exposed portion of the fin-shaped barrier layer; anddepositing a semiconductor material on the exposed portion of thefin-shaped barrier layer to form a source region and a drain region.

In some embodiments, the substrate may include a base layer, a firstbuffer layer formed on the base layer, and a second buffer layer formedon the first buffer layer; and forming the substrate structure mayfurther include forming the first buffer layer on a surface of the baselayer, forming the second buffer layer on a surface of the first bufferlayer, forming a barrier layer on a surface of the second buffer layer,and patterning the barrier layer to form the fin-shaped barrier layer,wherein the first buffer layer may include SiGe or GaAs, and the secondbuffer layer may include AlAs.

In some embodiments, the base layer may include Si.

In some embodiments, the fin-shaped barrier layer may include InAlAs,the QW material layer may include InGaAs, and the barrier material layermay include InP.

In some embodiments, the fin-shaped barrier layer may have a thicknessranging from about 10 nm to about 500 nm, the QW material layer may havea thickness ranging from about 10 nm to about 100 nm, and the barriermaterial layer may have a thickness ranging from about 10 nm to about100 nm.

According to some other embodiments of the inventive concept, asemiconductor device is provided. The semiconductor device includes asubstrate, a fin-shaped barrier layer formed on a surface of thesubstrate, a quantum well (QW) material layer formed on a surface of thefin-shaped barrier layer, and a barrier material layer formed on the QWmaterial layer.

In some embodiments, the semiconductor device may further include aninsulating part formed adjacent to the fin-shaped barrier layer on thesurface of the substrate, and wherein the QW material layer may beformed on a portion of the surface of the fin-shaped barrier layer thatis not covered by the insulating part.

In some embodiments, the semiconductor device may further include a gatestructure comprising a gate insulating layer formed on a portion of thebarrier material layer and a portion of the insulating part, a gateformed on the gate insulating layer, and a spacer formed on oppositesides of the gate.

In some embodiments, the semiconductor device may further include asource region and a drain region formed on an exposed portion of thefin-shaped barrier layer.

In some embodiments, the semiconductor device may further include a gatestructure comprising a gate insulating layer formed on at least aportion of the barrier material layer, a gate formed on the gateinsulating layer, and a spacer formed on opposite sides the gate.

In some embodiments, the semiconductor device may further include asource region and a drain region formed on an exposed portion of thefin-shaped barrier layer.

In some embodiments, the substrate may include a base layer, a firstbuffer layer formed on a surface of the base layer, a second bufferlayer formed on a surface of the first buffer layer, wherein the firstbuffer layer may include SiGe or GaAs, and the second buffer layer mayinclude AlAs.

In some embodiments, the base layer may include Si.

In some embodiments, the fin-shaped barrier layer may include InAlAs,the QW material layer may include InGaAs, and the barrier material layermay include InP.

In some embodiments, the fin-shaped barrier layer may have a thicknessranging from about 10 nm to about 500 nm; the QW material layer may havea thickness ranging from about 10 nm to about 100 nm; and the barriermaterial layer may have a thickness ranging from about 10 nm to about100 nm.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate different embodiments of theinventive concept and, together with the detailed description, serve toexplain more clearly the inventive concept.

FIG. 1 is a flowchart of a method of fabricating a semiconductor deviceaccording to an embodiment of the inventive concept.

FIGS. 2 to 12 depict cross-sectional views of a semiconductor device atdifferent stages of fabrication according to an embodiment of theinventive concept.

DETAILED DESCRIPTION

Various embodiments of the inventive concept are next described withreference to the accompanying drawings. It is noted that the followingdescription of the different embodiments is merely illustrative innature, and is not intended to limit the inventive concept, itsapplication, or use. Also, the relative arrangement of the componentsand steps, and the numerical expressions and numerical values set forthin these embodiments do not limit the scope of the inventive conceptunless specifically stated otherwise.

It is noted that in the accompanying drawings, for convenience ofdescription, the dimensions of the components shown may not be drawn toscale. Also, same or similar reference numbers between differentdrawings represent the same or similar components.

Techniques, methods, and apparatus known by those of ordinary skill inthe relevant art may not necessarily be described in detail. However, itshould be appreciated that techniques, methods, and apparatus known tothose skilled in the art are intended to be part of the specificationwhere appropriate.

In the embodiments described herein, any specific values areillustrative and non-limiting. Accordingly, other examples andembodiments of the inventive concept may have different values.

FIG. 1 is a flowchart of a method of fabricating a semiconductor deviceaccording to an embodiment of the inventive concept. Referring to FIG.1, a substrate structure is formed (Step 101). The substrate structureincludes a substrate, and a fin-shaped barrier layer formed on a surfaceof the substrate.

In some embodiments, the substrate may include a base layer, a firstbuffer layer formed on the base layer, and a second buffer layer formedon the first buffer layer. Accordingly, in those embodiments, formingthe substrate structure (Step 101) may include: forming the first bufferlayer on a surface of the base layer, forming the second buffer layer ona surface of the first buffer layer, forming a barrier layer on asurface of the second buffer layer, and patterning the barrier layer toform the fin-shaped barrier layer.

In some embodiments, the first buffer layer may include SiGe or GaAs,and the second buffer layer may include AlAs. In some embodiments, athickness of each of the first and second buffer layers may range fromabout 10 nm to about 500 nm. In some embodiments, the base layer mayinclude Si. For example, in embodiments in which the first buffer layeris formed including SiGe or GaAs and the second buffer layer is formedincluding AlAs, the base layer is preferably a <111> Si base (i.e. a Sibase having the <111> crystal face as its primary surface).

In some other embodiments, the base layer may include, for example, asapphire base or any other appropriate base material.

In some embodiments, the fin-shaped barrier layer may include InAlAs.

Next, a QW material layer is formed on a surface of the fin-shapedbarrier layer (Step 102). In some embodiments, the QW material layer mayinclude InGaAs. The QW material layer may be formed, for example,through selective epitaxy growth.

Next, a barrier material layer is formed on the QW material layer (Step103). In some embodiments, the barrier material layer may include InP.The barrier material layer may be formed, for example, through selectiveepitaxy growth.

Accordingly, a semiconductor device (e.g. a HEMT device) having anon-planar (e.g. fin-shaped) QW structure may be formed using theexemplary method depicted in FIG. 1. A Two-Dimensional Electron Gas(2-DEG) layer is formed in the QW structure. Accordingly, the QWstructure can mitigate short-channel effects, thereby enabling highcarrier mobility in the semiconductor device.

In some embodiments, a gate structure may be further formed on the QWstructure. The gate structure may include a gate insulating layer formedon the barrier material layer, agate formed on the gate insulatinglayer, and a spacer formed on opposite sides of the gate. Theaforementioned gate structure may be referred to as a first gatestructure. The first gate structure may be formed using processes andmaterials that are known to those skilled in the art, and therefore adetailed description of those processes and materials shall be omitted.

In some embodiments, an insulating part may be formed adjacent to thefin-shaped barrier layer. In those embodiments, forming a QW materiallayer on a surface of the fin-shaped barrier layer (Step 102) mayinclude forming the QW material layer on the surface of the fin-shapedbarrier layer that is not covered by the insulating part. Thus, in thoseembodiments, the QW material layer is formed on the surface of thefin-shaped barrier layer that is not covered by the insulating part.Accordingly, in those embodiments, the gate structure may include a gateinsulating layer formed on a portion of the barrier material layer and aportion of the insulating part, a gate formed on the gate insulatinglayer, and a spacer formed on opposite sides of the gate. Theaforementioned gate structure may be referred to as a second gatestructure.

It should be understood however, that the inventive concept is notlimited to the above-described embodiments. For example, those skilledin the art may select appropriate materials for the buffer layers andthe barrier layer (that are compatible with the QW material) to form thesemiconductor structure in this disclosure.

In some embodiments, the fin-shaped barrier layer may have a thicknessranging from about 10 nm to about 500 nm; the QW material layer may havea thickness ranging from about 10 nm to about 100 nm; and the barriermaterial layer may have a thickness ranging from about 10 nm to about100 nm. It should be understood that those numbers or numerical rangesare merely exemplary, and that the inventive concept is not limitedthereto.

In some embodiments, after the gate structure has been formed, etchingis performed using the gate structure as a mask, until a portion of thefin-shaped barrier layer is exposed. The QW material layer and thebarrier material layer under the gate structure are etched having anundercut, so as to increase an area of the exposed portion of thefin-shaped barrier layer. Subsequently, a semiconductor material isgrown on the exposed portion of the fin-shaped barrier layer to form asource region and a drain region. The undercut in the QW material layerand the barrier material layer under the gate structure can aid in theepitaxy growth of the source region and the drain region.

FIGS. 2 to 12 depict cross-sectional views of a semiconductor device atdifferent stages of fabrication according to an embodiment of theinventive concept. In particular, FIGS. 2, 3 a, 4 a, 5 a, 6 a, 7 a, 8 a,and 9 a illustrate cross-sectional views of the resulting structureperpendicular to the longitudinal direction of the fin (i.e.perpendicular to the channel direction), and FIGS. 3 b, 4 b, 5 b, 6 b, 7b, 8 b, 9 b, 10, 11, and 12 illustrate cross-sectional views of theresulting structure along the longitudinal direction of the fin (i.e.along the channel direction), at different stages of fabrication.

First, as shown in FIG. 2, a first buffer layer 2, a second buffer layer3, and a barrier layer 4 are sequentially formed on a base layer 1through, for example, MOCVD (Metal-Organic Chemical Vapor Deposition),ALD (Atomic Layer Deposition), MBE (Molecular Beam Epitaxy), or othersimilar deposition techniques. The base layer 1, the first buffer layer2, and the second buffer layer 3 collectively constitute a substrate. Insome embodiments, the base layer 1 may include Si having <111>orientation as its primary surface crystal orientation. In someembodiments, the first buffer layer 2 may include SiGe or GaAs, thesecond buffer layer 3 may include AlAs, and the barrier layer 4 mayinclude InAlAs. In some embodiments, a thickness of each of the firstbuffer layer and the second buffer layer may range from about 10 nm toabout 500 nm.

Next, as shown in FIGS. 3 a and 3 b, the barrier layer 4 is patterned toform a fin-shaped barrier layer 5 on the second buffer layer 3. Thebarrier layer 4 may be patterned through, for example, lithography anddry etching.

Next, as shown in FIGS. 4 a and 4 b, an insulating part 6 is formed onthe surface of the second buffer layer 3. The insulating part 6 isformed adjacent to the fin-shaped barrier layer 5 (see FIG. 4 a). Insome embodiments, the insulating part 6 may include a SiO₂ layer havinga thickness ranging from about 50 nm to about 500 nm. In some particularembodiments, the insulating layer may be omitted.

Next, as shown in FIGS. 5 a and 5 b, a QW material layer 7 is formed onthe surface of the fin-shaped barrier layer 5, and a barrier materiallayer 8 is formed on the QW material layer 7. In some embodiments, theQW material 7 may include InGaAs and the barrier material may includeInP. As previously described, the QW material layer 7 and the barriermaterial layer 8 may be formed through selective epitaxy growth.

In some embodiments, the fin-shaped barrier layer 5 may have a thicknessranging from about 10 nm to about 500 nm; the QW material layer 7 mayhave a thickness ranging from about 10 nm to about 100 nm; and thebarrier material layer 8 may have a thickness ranging from about 10 nmto about 100 nm.

Next, as shown in FIGS. 6 a and 6 b, a gate insulating layer 9 is formedover the structure of FIGS. 5 a and 5 b, the gate insulating layer 9covering at least a portion of the insulating part 6 and at least aportion of the barrier material layer 8. In some embodiments, the gateinsulating layer 9 may include a high-K dielectric, for example, Al₂O₃,TiSiO_(x), etc. In some embodiments, the gate insulating layer 9 mayhave a thickness ranging from about 1 nm to about 5 nm.

Next, as shown in FIGS. 7 a and 7 b, a gate material 10 is deposited onthe gate insulating layer 9. The gate material 10 may be depositedthrough, for example, PVD, MOCVD, ALD, MBE, or other similar depositiontechniques.

Next, as shown in FIGS. 8 a and 8 b, a gate 11 is formed by patterningthe gate material 10. In some embodiments, the gate material 10 mayinclude polysilicon, and as such the gate 11 may be a polysilicon gateor pseudo (dummy) gate. In other embodiments, the gate material 10 mayinclude a metal or metal alloy (e.g. Ni—Au or Cr—Au), and as such thegate 11 may be a metal gate.

After the gate 11 has been formed, a spacer 12 is formed on oppositesides of the gate 11 (see FIGS. 9 a and 9 b). Etching is then performedusing the gate 11 and the spacer 12 as a mask, until a portion of thefin-shaped barrier layer 5 is exposed.

Next, as shown in FIG. 10, the QW material layer 7 and the barriermaterial layer 8 under the gate structure are etched having an undercut,so as to increase an area of the exposed portion of the fin-shapedbarrier layer 5.

Next, as shown in FIG. 11, a semiconductor material is grown on theexposed portion of the fin-shaped barrier layer 5 to form a sourceregion/drain region 13.

Next, as shown in FIG. 12, a source/drain 14 is formed in thecorresponding source region/drain region 13.

Specifically, FIG. 12 illustrates a semiconductor device (e.g. a HEMTdevice) having a non-planar (e.g. fin-shaped) QW structure. ATwo-Dimensional Electron Gas (2-DEG) layer is formed in the QWstructure. Accordingly, the QW structure can mitigate short-channeleffects, thereby enabling high carrier mobility in the semiconductordevice.

It should be understood that the inventive concept is not limited to theembodiments described above. Those skilled in the art may appreciatethat a polysilicon gate or pseudo (dummy) gate can be replaced by ametal gate in a subsequent step. For example, in some embodiments, thepolysilicon gate or pseudo (dummy) gate may be removed after forming thesource region and the drain region. Subsequently, a metal gate may beformed in place of the polysilicon gate or pseudo (dummy) gate.

A semiconductor device and method of fabricating the semiconductordevice according to embodiments of the inventive concept have beendescribed above. In order to avoid obscuring the inventive concept,details that are well-known in the art may have been omitted.Nevertheless, those skilled in the art would be able to understand theimplementation of the inventive concept and its technical details inview of the present disclosure.

The embodiments of the inventive concept have been described withreference to the accompanying drawings. However, the embodiments aremerely illustrative and do not limit the scope of the inventive concept.Furthermore, those skilled in the art would appreciate that variousmodifications can be made to the different embodiments without departingfrom the scope of the present disclosure.

What is claimed is:
 1. A method of fabricating a semiconductor device,the method comprising: forming a substrate structure, wherein thesubstrate structure includes a substrate and a fin-shaped barrier layerformed on a surface of the substrate; forming an insulating partadjacent to the fin-shaped barrier layer on the surface of thesubstrate, wherein the surface of the substrate directly contacts eachof the fin-shaped barrier and the insulating part and is parallel to abottom side of the substrate; forming a quantum well (QW) material layeron a surface of the fin-shaped barrier layer; and forming a barriermaterial layer on the QW material layer.
 2. The method according toclaim 1, wherein the forming the QW material layer on the surface of thefin-shaped barrier layer comprises: forming the QW material layer on aportion of the surface of the fin-shaped barrier layer that is notcovered by the insulating part.
 3. The method according to claim 2,further comprising: forming a gate structure, wherein the gate structureincludes a gate insulating layer formed on a portion of the barriermaterial layer and a portion of the insulating part, a gate formed onthe gate insulating layer, and a spacer formed on opposite sides of thegate.
 4. The method according to claim 3, further comprising: etching,using the gate structure as a mask, until a portion of the fin-shapedbarrier layer is exposed; forming an undercut in the QW material layerand the barrier material layer under the gate structure, so as toincrease an area of the exposed portion of the fin-shaped barrier layer;and depositing a semiconductor material on the exposed portion of thefin-shaped barrier layer to form a source region and a drain region. 5.The method according to claim 1, further comprising: forming a gatestructure, wherein the gate structure includes a gate insulating layerformed on at least a portion of the barrier material layer, a gateformed on the gate insulating layer, and a spacer formed on oppositesides of the gate.
 6. The method according to claim 5, furthercomprising: etching, using the gate structure as a mask, until a portionof the fin-shaped barrier layer is exposed; forming an undercut in theQW material layer and the barrier material layer under the gatestructure, so as to increase an area of the exposed portion of thefin-shaped barrier layer; and depositing a semiconductor material on theexposed portion of the fin-shaped barrier layer to form a source regionand a drain region.
 7. The method according to claim 1, wherein thesubstrate includes a base layer and at least one buffer layer formed onthe base layer, wherein the at least one buffer layer comprises a firstbuffer layer formed on the base layer and a second buffer layer formedon the first buffer layer, and wherein the forming the substratestructure comprises: forming the first buffer layer on a surface of thebase layer, forming the second buffer layer on a surface of the firstbuffer layer, forming a barrier layer on a surface of the second bufferlayer, and patterning the barrier layer to form the fin-shaped barrierlayer, wherein the first buffer layer includes SiGe or GaAs, and thesecond buffer layer includes AlAs.
 8. The method according to claim 7,wherein the base layer includes Si.
 9. The method according to claim 1,wherein the fin-shaped barrier layer includes InAlAs, the QW materiallayer includes InGaAs, and the barrier material layer includes InP. 10.The method according to claim 1, wherein: the fin-shaped barrier layerhas a thickness ranging from about 10 nm to about 500 nm, the QWmaterial layer has a thickness ranging from about 10 nm to about 100 nm,and the barrier material layer has a thickness ranging from about 10 nmto about 100 nm.
 11. A semiconductor device, comprising: a substrate; afin-shaped barrier layer directly contacting a surface of the substrate,wherein the surface of the substrate is parallel to a side of thesubstrate; an insulating part formed adjacent to the fin-shaped barrierlayer and directly contacting the surface of the substrate; a quantumwell (QW) material layer formed on a surface of the fin-shaped barrierlayer; and a barrier material layer formed on the QW material layer. 12.The semiconductor device according to claim 11, further comprising: agate structure comprising a gate insulating layer formed on a portion ofthe barrier material layer and a portion of the insulating part, a gateformed on the gate insulating layer, and a spacer formed on oppositesides of the gate.
 13. The semiconductor device according to claim 12,further comprising: a source region and a drain region formed on anexposed portion of the fin-shaped barrier layer.
 14. The semiconductordevice according to claim 11, further comprising: a gate structurecomprising a gate insulating layer formed on at least a portion of thebarrier material layer, a gate formed on the gate insulating layer, anda spacer formed on opposite sides the gate.
 15. The semiconductor deviceaccording to claim 14, further comprising: a source region and a drainregion formed on an exposed portion of the fin-shaped barrier layer. 16.The semiconductor device according to claim 11, wherein the substrateincludes a base layer and at least one buffer layer formed on the baselayer, wherein the at least one buffer layer comprises a first bufferlayer formed on a surface of the base layer and comprises a secondbuffer layer formed on a surface of the first buffer layer, and whereinthe first buffer layer includes SiGe or GaAs, and the second bufferlayer includes AlAs.
 17. The semiconductor device according to claim 16,wherein the base layer includes Si.
 18. The semiconductor deviceaccording to claim 11, wherein the fin-shaped barrier layer includesInAlAs, the QW material layer includes InGaAs, and the barrier materiallayer includes InP.
 19. The semiconductor device according to claim 11,wherein: the fin-shaped barrier layer has a thickness ranging from about10 nm to about 500 nm; the QW material layer has a thickness rangingfrom about 10 nm to about 100 nm; and the barrier material layer has athickness ranging from about 10 nm to about 100 nm.
 20. A method offabricating a semiconductor device, the method comprising: forming asubstrate; forming a fin-shaped barrier layer on the substrate; forminga quantum well (QW) material layer on the fin-shaped barrier layer;forming a barrier material layer on the QW material layer; forming agate structure on the barrier material layer; etching, using the gatestructure as a mask, until a portion of the fin-shaped barrier layer isexposed; forming an undercut in the QW material layer under the gatestructure; and depositing a semiconductor material on the portion of thefin-shaped barrier layer.